LG Orders Nikon’s Gen 10.5 Lithography Tool
 
LG Display has ordered a lithography tool for their new Gen 10.5 fab being constructed in Paju.  The facility has been under construction for 2 years and appears close to complete. The tool is a Nikon FX-101S model that will be adapted to a larger size.  The current Nikon Gen 10 lithography tool supports substrate size of 2880x3130mm (~9m2) while LG line is constructing a 3300x3340mm (~11m2) size.  The smaller tool has a TACT of 70 seconds, which would be a bit higher for the larger substrate, producing unyielded volume of ~360 65” TV panels/hour or 263k/month (3.15m/year). Nikon’s sole competitor, Canon does not yet have a comparable product so panel makers must put up with lead times of between 14 and 18 months.  If LG placed the order in February, the expected delivery date would be between April and August 2018.  The Gen 10.5 fab is expected to be designed to produce both LCD and OLED panels.
 
 
Figure 1: Nikon FX101S Lithography Tool 

Source: Company

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